Title :
A silicon self-aligned non-reverse valve
Author :
Smith, L. ; Hok, B.
Author_Institution :
Dept. of Electron., Uppsala Univ., Sweden
Abstract :
A novel design of a microvalve has been fabricated. The valve is fabricated on one
Keywords :
electric actuators; flow control; membranes; micromechanical devices; silicon; valves; Si wafer; flow control; membranes; micropump; microvalve; selfaligned nonreverse valve; thin slit; thinned V-groove; Anisotropic magnetoresistance; Biomembranes; Chemical analysis; Chemical elements; Costs; Etching; Fabrication; Micropumps; Silicon; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.149076
