DocumentCode
1606122
Title
A silicon self-aligned non-reverse valve
Author
Smith, L. ; Hok, B.
Author_Institution
Dept. of Electron., Uppsala Univ., Sweden
fYear
1991
Firstpage
1049
Lastpage
1051
Abstract
A novel design of a microvalve has been fabricated. The valve is fabricated on one
Keywords
electric actuators; flow control; membranes; micromechanical devices; silicon; valves; Si wafer; flow control; membranes; micropump; microvalve; selfaligned nonreverse valve; thin slit; thinned V-groove; Anisotropic magnetoresistance; Biomembranes; Chemical analysis; Chemical elements; Costs; Etching; Fabrication; Micropumps; Silicon; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-87942-585-7
Type
conf
DOI
10.1109/SENSOR.1991.149076
Filename
149076
Link To Document