Title :
Radio Frequency MicroElectroMechanical Systems Components
Author :
Okoniewski, Michal ; McFeetors, Greg
Author_Institution :
Calgary Univ., Calgary
Abstract :
Radio frequency applications for microelectromechanical systems are reviewed, from a performance and fabrication prospective. The state of art in RF MEMS devices is discussed, focusing on switches, inductors, varactors, filters, phase shifters and antennas.
Keywords :
antennas; inductors; microswitches; phase shifters; radiofrequency filters; varactors; RF MEMS; antennas; filters; inductors; phase shifters; radio frequency microelectromechanical system; switches; varactors; Art; Fabrication; Filters; Inductors; Microelectromechanical systems; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Varactors;
Conference_Titel :
Microwaves, Radar & Wireless Communications, 2006. MIKON 2006. International Conference on
Conference_Location :
Krakow
Print_ISBN :
978-83-906662-7-3
DOI :
10.1109/MIKON.2006.4345126
