• DocumentCode
    1606327
  • Title

    Radio Frequency MicroElectroMechanical Systems Components

  • Author

    Okoniewski, Michal ; McFeetors, Greg

  • Author_Institution
    Calgary Univ., Calgary
  • fYear
    2006
  • Firstpage
    147
  • Lastpage
    154
  • Abstract
    Radio frequency applications for microelectromechanical systems are reviewed, from a performance and fabrication prospective. The state of art in RF MEMS devices is discussed, focusing on switches, inductors, varactors, filters, phase shifters and antennas.
  • Keywords
    antennas; inductors; microswitches; phase shifters; radiofrequency filters; varactors; RF MEMS; antennas; filters; inductors; phase shifters; radio frequency microelectromechanical system; switches; varactors; Art; Fabrication; Filters; Inductors; Microelectromechanical systems; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Varactors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwaves, Radar & Wireless Communications, 2006. MIKON 2006. International Conference on
  • Conference_Location
    Krakow
  • Print_ISBN
    978-83-906662-7-3
  • Type

    conf

  • DOI
    10.1109/MIKON.2006.4345126
  • Filename
    4345126
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1606327