Title :
Smallest dead volume microvalves for integrated chemical analyzing systems
Author :
Shoji, S. ; Van der Schoot, B. ; de Rooij, N. ; Esashi, M.
Abstract :
Normally open, normally closed, and three-way microvalves were developed. These microvalves had a simple structure and small dead volume on the order of tens of nl. Each microvalve was driven by a stack-type piezo-actuator and the controllable flow range is from 1 mu l/min to tens of mu l/min. These valves are useful for constructing integrated chemical analyzing systems.<>
Keywords :
chemical analysis; electric actuators; flow control; micromechanical devices; silicon; valves; Si wafers; controllable flow range; integrated chemical analyzing systems; micromachining; normally closed microvalves; normally open microvalves; small dead volume; stack-type piezo-actuator; three-way microvalves; Actuators; Biomembranes; Chemical analysis; Chemical sensors; Microchannel; Micropumps; Microvalves; Polymers; Silicon; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.149077
