• DocumentCode
    1606688
  • Title

    An application of PZT thick films on LTCC substrates: A case study of a resonant pressure sensor

  • Author

    Zarnik, M.S. ; Belavic, D. ; Macek, S. ; Kosec, M.

  • Author_Institution
    HIPOT-RR, ¿entjernej, Slovenia, c/o Jo¿ef Stefan Institute, Ljubljana, Slovenia
  • Volume
    3
  • fYear
    2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Lead-zirconate-titanate (PZT) thick films on pre-fired low-temperature co-fired ceramic (LTCC) substrates were characterised and tested for the application of a piezoelectric resonant pressure sensor. The experimentally obtained material parameters for the thick-film (TF) PZT were used in a finite-element (FE) model of the sensor, which was realised in a 3D LTCC structure with a flexible diaphragm. The simulations revealed the trends and helped to optimise the design.
  • Keywords
    Ceramics; Composite materials; Iron; Piezoelectric materials; Resonance; Sensor phenomena and characterization; Substrates; Testing; Thick film sensors; Thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
  • Conference_Location
    Santa Re, NM, USA
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-2744-4
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2008.4693827
  • Filename
    4693827
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1606688