DocumentCode
1607049
Title
Electrical properties of VO2 thin films grown by PLD
Author
Mendoza, F. ; Fernandez, F.
Author_Institution
University of Puerto Rico, Rio Piedras, USA
Volume
3
fYear
2008
Firstpage
1
Lastpage
2
Abstract
A set of electronic instrumentation was configured to perform measurements of resistivity and Hall coefficient based on the four-point van der Pauw technique. Measurements were performed on silicon wafer and vanadium dioxide thin films. The abrupt change in resistivity at the critical semiconductor to metal transition temperature, by up to five orders of magnitude, was verified for VO2 thin films grown by pulsed laser deposition on sapphire substrate, and lower for films grown on MgO on glass substrates. For the sample grown on sapphire other transport properties for, obtained through Hall effect measurements, were obtained.
Keywords
Conductivity; Instruments; Performance evaluation; Pulsed laser deposition; Semiconductor thin films; Silicon; Sputtering; Substrates; Temperature; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location
Santa Re, NM, USA
ISSN
1099-4734
Print_ISBN
978-1-4244-2744-4
Electronic_ISBN
1099-4734
Type
conf
DOI
10.1109/ISAF.2008.4693843
Filename
4693843
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