• DocumentCode
    1607049
  • Title

    Electrical properties of VO2 thin films grown by PLD

  • Author

    Mendoza, F. ; Fernandez, F.

  • Author_Institution
    University of Puerto Rico, Rio Piedras, USA
  • Volume
    3
  • fYear
    2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A set of electronic instrumentation was configured to perform measurements of resistivity and Hall coefficient based on the four-point van der Pauw technique. Measurements were performed on silicon wafer and vanadium dioxide thin films. The abrupt change in resistivity at the critical semiconductor to metal transition temperature, by up to five orders of magnitude, was verified for VO2 thin films grown by pulsed laser deposition on sapphire substrate, and lower for films grown on MgO on glass substrates. For the sample grown on sapphire other transport properties for, obtained through Hall effect measurements, were obtained.
  • Keywords
    Conductivity; Instruments; Performance evaluation; Pulsed laser deposition; Semiconductor thin films; Silicon; Sputtering; Substrates; Temperature; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
  • Conference_Location
    Santa Re, NM, USA
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-2744-4
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2008.4693843
  • Filename
    4693843