Title :
MEMS-Like Phase Shifter with Piezoelectric Control
Author :
Poplavko, Y.M. ; Golubeva, I.P. ; Prokopenko, Y.V.
Author_Institution :
Nat. Tech. Univ. of Ukraine, Kiev
Abstract :
This paper presents an attempt to realize control over effective parameters of transmission line utilising design suitable for MEMS applications. Proposed combined structure usually consists of two dielectric parts (or dielectric and electrode) with an air gap between them. By means of fast piezoelectric mini-actuator, the size of the air gap is changed. At present time phase shifters, based on varactor and PIN diodes constitute main options in MMICs.
Keywords :
microactuators; phase shifters; piezoelectric actuators; varactors; MEMS application; MMIC; dielectric part; micromechanical device; phase shifter; piezoelectric control; transmission line; varactor; Conductivity; Control systems; Dielectrics; Electrodes; Frequency; MMICs; Micromechanical devices; Microstrip; Permittivity; Phase shifters;
Conference_Titel :
Microwaves, Radar & Wireless Communications, 2006. MIKON 2006. International Conference on
Conference_Location :
Krakow
Print_ISBN :
978-83-906662-7-3
DOI :
10.1109/MIKON.2006.4345179
