Title :
Micro-machining of glass by excimer laser ablation
Author :
von Alvensleben, F. ; Graumann, C. ; Wais, J.W.
Author_Institution :
Laser Zentrum Hannover e.V.
Abstract :
Summary form only given, as follows. Micro-structuring of glass has been examined using UV radiation. The etch depth profile has been investigated. The limitations and possibilities for micro-structuring on glass has been found for the wavelengths of 193nm, 248nm and 308nm.
Keywords :
Glass; Laser ablation;
Conference_Titel :
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-4233X
DOI :
10.1109/CLEOE.1998.719464
