• DocumentCode
    1608483
  • Title

    Growth and structural properties of GaAs on Al pseudo-substrates for ultrafast optoelectronics

  • Author

    Sofer, Z. ; Sedmidubský, D. ; Mikulics, M.

  • Author_Institution
    Dept. of Inorg. Chem., Inst. of Chem. Technol., Prague, Czech Republic
  • fYear
    2010
  • Firstpage
    101
  • Lastpage
    104
  • Abstract
    GaAs is broadly used in modern electronics. On the other hand, application of GaAs-based devices in high power electronics is complicated due to the substantial excess heat generated during device operation. One possibility to remove the excess heat is to employ substrates with high thermal conductivity. In this contribution we present the growth of GaAs layers by MOVPE on aluminum (111) pseudo-substrates designed for an improved heat management in GaAs electronic circuits. Pseudo-substrates for GaAs deposition were prepared by Al evaporation on (100) GaAs substrate and subsequently heat treated. The GaAs layers exhibit polycrystalline character with high preferential orientation in (100) direction. The roughness of the layers was in the range of 10 to 100 nm and the thickness in the range of 500 - 3000 nm. These layers exhibit extremely low carrier lifetime due to the growth-induced defects and are suitable for fabrication of ultrafast MSM photodetectors.
  • Keywords
    III-V semiconductors; MOCVD; carrier lifetime; gallium arsenide; heat treatment; semiconductor epitaxial layers; semiconductor growth; vacuum deposition; Al; GaAs; MOVPE; aluminum (111) pseudosubstrate; carrier lifetime; epitaxial layers; evaporation; growth-induced defects; heat treatment; polycrystalline character; preferential orientation; size 500 nm to 3000 nm; structural properties; ultrafast MSM photodetectors; ultrafast optoelectronics; Aluminum; Gallium arsenide; Heating; Substrates; Temperature measurement; Thickness measurement; X-ray diffraction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
  • Conference_Location
    Smolenice
  • Print_ISBN
    978-1-4244-8574-1
  • Type

    conf

  • DOI
    10.1109/ASDAM.2010.5666314
  • Filename
    5666314