Title :
Growth and structural properties of GaAs on Al pseudo-substrates for ultrafast optoelectronics
Author :
Sofer, Z. ; Sedmidubský, D. ; Mikulics, M.
Author_Institution :
Dept. of Inorg. Chem., Inst. of Chem. Technol., Prague, Czech Republic
Abstract :
GaAs is broadly used in modern electronics. On the other hand, application of GaAs-based devices in high power electronics is complicated due to the substantial excess heat generated during device operation. One possibility to remove the excess heat is to employ substrates with high thermal conductivity. In this contribution we present the growth of GaAs layers by MOVPE on aluminum (111) pseudo-substrates designed for an improved heat management in GaAs electronic circuits. Pseudo-substrates for GaAs deposition were prepared by Al evaporation on (100) GaAs substrate and subsequently heat treated. The GaAs layers exhibit polycrystalline character with high preferential orientation in (100) direction. The roughness of the layers was in the range of 10 to 100 nm and the thickness in the range of 500 - 3000 nm. These layers exhibit extremely low carrier lifetime due to the growth-induced defects and are suitable for fabrication of ultrafast MSM photodetectors.
Keywords :
III-V semiconductors; MOCVD; carrier lifetime; gallium arsenide; heat treatment; semiconductor epitaxial layers; semiconductor growth; vacuum deposition; Al; GaAs; MOVPE; aluminum (111) pseudosubstrate; carrier lifetime; epitaxial layers; evaporation; growth-induced defects; heat treatment; polycrystalline character; preferential orientation; size 500 nm to 3000 nm; structural properties; ultrafast MSM photodetectors; ultrafast optoelectronics; Aluminum; Gallium arsenide; Heating; Substrates; Temperature measurement; Thickness measurement; X-ray diffraction;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4244-8574-1
DOI :
10.1109/ASDAM.2010.5666314