DocumentCode

1608785

Title

Characterization of Laser Plasma Plume for Deposition of CN/sub x/ Films

Author

Lancok, J. ; Jelinek, J. ; Bulir, J. ; Grivas, Christos

Author_Institution

Czech Academy of Sciences

fYear

1998

Firstpage

313

Lastpage

313

Keywords

Plasmas;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on

Conference_Location

Glasgow, Scotland

Print_ISBN

0-7803-4233X

Type

conf

DOI

10.1109/CLEOE.1998.719470

Filename

719470