• DocumentCode
    1608928
  • Title

    Capacitance of thin Ferroelectric films obtained with different methods

  • Author

    Li, Huadong ; Subramanyam, Guru ; Wang, Jiadong

  • Author_Institution
    Department of Electrical Engineering, University of Dayton, 300 College Park, OH 45469, USA
  • Volume
    1
  • fYear
    2008
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Thin film Ferroelectric capacitance can be obtained with two methods. Capacitance obtained by the derivative of its hysteresis loop is related to large applied signal. Capacitance measured directly with small applied alternate current signal together with slow changing dc bias is related to small signal circuit analysis. This paper investigated the relationship between the two types of capacitance. Measurements show that C-V curves obtained with the first method have much sharper peaks and higher peak values. A model, which divides the polarization of Pb (Zr, Ti) O3 (PZT) into linear polarization and switching polarization, was utilized to analyze the mechanism.
  • Keywords
    Capacitance measurement; Capacitance-voltage characteristics; Circuit analysis; Current measurement; Ferroelectric films; Ferroelectric materials; Hysteresis; Polarization; Thin film circuits; Zirconium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
  • Conference_Location
    Santa Re, NM, USA
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-2744-4
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2008.4693924
  • Filename
    4693924