Title :
Backside-Laser Annealing of Silicon at Low Temperature
Author :
Antonova, L.K. ; Bayazitov, R.M. ; Galyautdinov, M.F. ; Grotzchel, R.
Author_Institution :
Kazan Physical-Technical Institute of The Russian Academy of Sciences
Keywords :
Annealing; Silicon; Temperature;
Conference_Titel :
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-4233X
DOI :
10.1109/CLEOE.1998.719474
