Accelerometer based on non-linear micromechanical transformer with frequency output

Author

Kalyonov, Vladimir ; Korlyakov, Andrey ; Vaigachev, Aleksandr

Author_Institution

Fac. of Electron., St. Petersburg Electrotech. Univ. “LETI”, St. Petersburg, Russia

fYear

2014

fDate

3-5 Feb. 2014

Firstpage

89

Lastpage

91

Abstract

Basic principle measurement of frequency-resonance method by nonlinear micromechanical transformer is developed in this article. The condition for increasing sensitivity of nonlinear micromechanical transformer by movement and force is offered. There is an example of accelerometer on principle of nonlinear micromechanical transformer and optimization its parameters is done.

Keywords

accelerometers; frequency measurement; microsensors; optimisation; transformers; accelerometer; frequency resonance method; nonlinear micromechanical transformer; parameter optimization; resonant frequency measurement; Acceleration; Accelerometers; Frequency measurement; Resonant frequency; Sensors; Suspensions; Transducers; MEMS; frequency-resonance method of measurement; micromechanical accelerometer; nonlinear micromechanical transformer;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Electronic Engineering Conference (ElConRusNW), Proceedings of the 2014 IEEE NW Russia Young Researchers in

Conference_Location

St. Petersburg

Print_ISBN

978-1-4799-2593-3

Type

conf

DOI

10.1109/ElConRusNW.2014.6839209

Filename

6839209