Title :
The compound oxides based on TiO2 and NiO thin films for low temperature gas detection
Author :
Kosc, I. ; Hotovy, I. ; Kompitsas, M. ; Grieseler, R. ; Wilke, M. ; Rehacek, V. ; Predanocy, M. ; Kups, T. ; Spiess, L.
Author_Institution :
Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia
Abstract :
The multilayer compound thin films, consisted of metal oxides (TiO2 and NiO) prepared by dc magnetron sputtering technique, have been studied. The structural, compositional, electrical and gas sensing properties have been investigated by XRD, GDOES and Van der Pauw method considering changes in layout, annealing temperature and addition of Au noble metal catalyst. The Au modified compound oxides exhibit fast response and enhanced sensitivity to hydrogen at low operating temperatures.
Keywords :
X-ray diffraction; gas sensors; nickel compounds; sputtering; thin films; titanium compounds; GDOES; NiO; TiO2; Van der Pauw method; XRD; compound oxides; dc magnetron sputtering technique; gas sensing properties; low temperature gas detection; multilayer compound thin films; noble metal catalyst; thin films; Annealing; Compounds; Films; Layout; Temperature measurement; Temperature sensors;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4244-8574-1
DOI :
10.1109/ASDAM.2010.5666355
