Title :
Stochastic Control in the Spin Coating Systems
Author_Institution :
Dept. of Math., Keio Univ., Kanagawa
Abstract :
In this paper, we propose a method of fluid control in the spin coating systems. Based on the stochastic Navier-Stokes equations, we provide a new formulation of nonlinear estimation and stochastic optimal control for the system
Keywords :
Navier-Stokes equations; industrial control; nonlinear control systems; optimal control; predictive control; spin coating; stochastic systems; Navier-Stokes equation; fluid control; nonlinear estimation; spin coating system; stochastic optimal control; Coatings; Control systems; Mathematics; Navier-Stokes equations; Optimal control; Shape control; Spinning; Stochastic systems; Temperature control; Tensile stress; Optimal Control; Spin Coating; Stochastic Navier-Stokes Equation;
Conference_Titel :
SICE-ICASE, 2006. International Joint Conference
Conference_Location :
Busan
Print_ISBN :
89-950038-4-7
Electronic_ISBN :
89-950038-5-5
DOI :
10.1109/SICE.2006.315681
