Title :
High Efficient Excimer ArF and KrF Lasers with Buffer Gas He
Author :
Bagaev, S.N. ; Razhev, A.M. ; Zhupikov, A.A.
Author_Institution :
Institute of Laser Physics
Keywords :
Gas lasers; Helium;
Conference_Titel :
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-4233X
DOI :
10.1109/CLEOE.1998.719554
