Title :
Ultra-thin chip with permalloy film for high performance MS/RF CMOS
Author :
Ohguro, T. ; Sato, N. ; Matsuo, M. ; Kojima, K. ; Momose, H.S. ; Ishimaru, K. ; Ishiuchi, H.
Author_Institution :
SoC Res. & Dev. Center, Toshiba Corp. Semicond. Co., Kanagawa, Japan
Abstract :
In this paper, we describe the high analog performance of MOSFETs and inductors on 1.7μm ultra-thin chip with permalloy film.
Keywords :
CMOS integrated circuits; MOSFET; Permalloy; inductors; integrated circuit noise; 1.7 micron; MOSFETs; high performance MS/RF CMOS; inductors; permalloy film; ultra-thin chip; Fabrication; MOS devices; MOSFETs; Magnetic films; Noise figure; Noise measurement; Packaging; Radio frequency; Semiconductor films; Substrates;
Conference_Titel :
VLSI Technology, 2004. Digest of Technical Papers. 2004 Symposium on
Print_ISBN :
0-7803-8289-7
DOI :
10.1109/VLSIT.2004.1345490
