• DocumentCode
    1611123
  • Title

    Ultra-thin chip with permalloy film for high performance MS/RF CMOS

  • Author

    Ohguro, T. ; Sato, N. ; Matsuo, M. ; Kojima, K. ; Momose, H.S. ; Ishimaru, K. ; Ishiuchi, H.

  • Author_Institution
    SoC Res. & Dev. Center, Toshiba Corp. Semicond. Co., Kanagawa, Japan
  • fYear
    2004
  • Firstpage
    220
  • Lastpage
    221
  • Abstract
    In this paper, we describe the high analog performance of MOSFETs and inductors on 1.7μm ultra-thin chip with permalloy film.
  • Keywords
    CMOS integrated circuits; MOSFET; Permalloy; inductors; integrated circuit noise; 1.7 micron; MOSFETs; high performance MS/RF CMOS; inductors; permalloy film; ultra-thin chip; Fabrication; MOS devices; MOSFETs; Magnetic films; Noise figure; Noise measurement; Packaging; Radio frequency; Semiconductor films; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 2004. Digest of Technical Papers. 2004 Symposium on
  • Print_ISBN
    0-7803-8289-7
  • Type

    conf

  • DOI
    10.1109/VLSIT.2004.1345490
  • Filename
    1345490
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1611123