Title : 
Influence of trapped charge on the sensitivity of Ionic-Sensitive Field Effect Transistor
         
        
            Author : 
Libin Liu ; Zhigang Zhang ; Jing Wang ; Jun Xu ; Yi-Ting Lin ; Chao-Sung Lai
         
        
            Author_Institution : 
Inst. of Microelectron., Tsinghua Univ., Beijing, China
         
        
        
        
        
        
            Abstract : 
The influence of trapped charge on the sensitivity of Ionic-Sensitive Field Effect Transistor (ISFET) is analyzed by a theoretical model. The trapped charges can be used to shift the pHpzc and then influence the sensitive characteristics of the ISFET. However, the trapped charge only takes effect when pH is around pHpzc.
         
        
            Keywords : 
ion sensitive field effect transistors; semiconductor device models; ISFET; ionic-sensitive field effect transistor; sensitivity characteristics; trapped charge; Capacitance; Electric potential; Field effect transistors; Ions; Logic gates; Sensitivity; Silicon; ISFET; flash; model; pH; sensitivity;
         
        
        
        
            Conference_Titel : 
Next-Generation Electronics (ISNE), 2014 International Symposium on
         
        
            Conference_Location : 
Kwei-Shan
         
        
        
            DOI : 
10.1109/ISNE.2014.6839361