DocumentCode
1611671
Title
Microwave Measurements of Thickness of Nanometer Metal Layers and Conductivity of Semiconductor in Structures "Metal-Semiconductor"
Author
Usanov, Dmitry A. ; Skripal, Alexander V. ; Abramov, Anton V. ; Bogolyubov, Anton S.
Author_Institution
Saratov State Univ., Saratov
fYear
2006
Firstpage
1104
Lastpage
1107
Abstract
Peculiarities of interaction of electromagnetic radiation with nanometer metal-semiconductor structures have been investigated theoretically and experimentally. Method for nondestructive multiparameter check of electrophysical parameters of nanometer metal-semiconductor structures using frequency dependence of reflectance and transmittance had been proposed and implemented experimentally.
Keywords
microwave measurement; nondestructive testing; semiconductor-metal boundaries; thickness measurement; electromagnetic radiation interaction; electrophysical parameter; microwave measurement; nanomerter metal-semiconductor structure; nanometer metal layer thickness; nondestructive multiparameter checking; Conductivity measurement; Dielectric substrates; Electromagnetic measurements; Electromagnetic scattering; Electromagnetic waveguides; Microwave measurements; Nanostructures; Reflectivity; Semiconductor waveguides; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwaves, Radar & Wireless Communications, 2006. MIKON 2006. International Conference on
Conference_Location
Krakow
Print_ISBN
978-83-906662-7-3
Type
conf
DOI
10.1109/MIKON.2006.4345379
Filename
4345379
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