DocumentCode :
1611823
Title :
Session 1: high-k dielectrics reliability (1)
fYear :
2004
Firstpage :
17
Lastpage :
17
Abstract :
Start of the above-titled section of the conference proceedings record.
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2004. IPFA 2004. Proceedings of the 11th International Symposium on the
Conference_Location :
Taiwan
Print_ISBN :
0-7803-8454-7
Type :
conf
DOI :
10.1109/IPFA.2004.1345521
Filename :
1345521
Link To Document :
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