Title :
Interfacing fluidic sensors based on LTCC
Author :
Gruchow, M. ; Schirmer, M. ; Uhlemann, J. ; Rebenklau, L. ; Wolter, K.J.
Author_Institution :
Dept. of Electr. Eng. & Inf. Technol., Tech. Univ. Dresden, Dresden, Germany
Abstract :
Fluidic sensors can be easily integrated in Low Temperature Cofiring Ceramic (LTCC) systems. This article describes electronic circuits for interfacing typical fluidic sensors, e.g. piezoresistive pressure transducers, anemometric flow meters and capacitive transducers. Due to their character the sensor signal have to be amplified, offset and temperature compensated and filtered. Furthermore the original physical value of these electrical signals has to be recalculated. On this basis some models for the transducers were designed.
Keywords :
anemometry; capacitive sensors; ceramics; flowmeters; fluidic devices; piezoresistive devices; pressure transducers; LTCC; anemometric flow meters; capacitive transducers; electrical signals; electronic circuits; fluidic sensors; low temperature cofiring ceramic systems; piezoresistive pressure transducers; temperature compensation; Bridge circuits; Capacitive sensors; Chemical sensors; Inductors; Resistors; Temperature dependence; Temperature sensors; Thick film sensors; Thick films; Thin film sensors;
Conference_Titel :
Electronics Technology, 2008. ISSE '08. 31st International Spring Seminar on
Conference_Location :
Budapest
Print_ISBN :
978-1-4244-3972-0
Electronic_ISBN :
978-1-4244-3974-4
DOI :
10.1109/ISSE.2008.5276611
