3D-microfluidic reactor in LTCC

The study and verification of fluids and chemical reactions in the macroscopic range is widespread in the pharmacy, in the chemical engineering and in the medical and biotechnological industry. By transferring the reactor structures in microfluidic solutions the process parameters can be improved, analyses optimized as well as new ranges of applications opened. The preliminary works of our department show that the thick layer technology and especially the multilayer technology by means of Low Temperature Cofiring Ceramic (LTCC) offer a promising possibility for the miniaturizations of fluidic devices. The aim of this work was the conversion of parameter specifications from the chemical engineering in a first pattern construction of a LTCC microreactor. Thereby sensors for the measurement of the fluidic characteristics had to be integrated into this compound and their utilizability had to be proved.