DocumentCode
1612010
Title
Processing of Alumina Nano-films
Author
Mach, P. ; Rozko, T.
fYear
2005
Firstpage
17
Lastpage
21
Keywords
Chemical technology; Chemical vapor deposition; Electrons; Fabrication; Humidity; Nanotechnology; Oxidation; Plasma measurements; Sputtering; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. 28th International Spring Seminar on
Print_ISBN
0-7803-9325-2
Type
conf
DOI
10.1109/ISSE.2005.1490991
Filename
1490991
Link To Document