Title :
Processing of Alumina Nano-films
Author :
Mach, P. ; Rozko, T.
Keywords :
Chemical technology; Chemical vapor deposition; Electrons; Fabrication; Humidity; Nanotechnology; Oxidation; Plasma measurements; Sputtering; Tunneling;
Conference_Titel :
Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. 28th International Spring Seminar on
Print_ISBN :
0-7803-9325-2
DOI :
10.1109/ISSE.2005.1490991
