Title : 
Novel laser scribed graphene devices
         
        
            Author : 
He Tian ; Yi Shu ; Ya-Long Cui ; Yi Yang ; Tian-Ling Ren
         
        
            Author_Institution : 
Tsinghua Nat. Lab. for Inf. Sci. & Technol. (TNList), Tsinghua Univ., Beijing, China
         
        
        
        
        
        
            Abstract : 
Wafer-scale graphene devices could be fabricated by one step laser scribing method. Four kinds of novel laser scribed graphene devices have been developed, including in-plane transistors, photodetectors, loudspeakers and strain sensors. The in-plane graphene transistors have a large on/off ratio up to 5.34. The graphene photodetector arrays were achieved with photo responsivity as high as 0.32 A/W. The graphene loudspeakers realize wide-band sound generation from 1 to 50 kHz. The graphene strain sensor has the gauge factor of 0.11. These results demonstrated that the laser scribed graphene could be used for wafer-scale integration of a variety of graphene-based devices.
         
        
            Keywords : 
graphene; laser beam applications; gauge factor; graphene loudspeakers; graphene photodetector arrays; graphene strain sensor; in-plane graphene transistors; laser scribed graphene devices; one step laser scribing method; wafer-scale graphene devices; wafer-scale integration; wideband sound generation; Graphene; Lasers; Loudspeakers; Photodetectors; Strain; Transistors; Graphene Devices; Laser Scribing; Sensors; Wafer-scale;
         
        
        
        
            Conference_Titel : 
Next-Generation Electronics (ISNE), 2014 International Symposium on
         
        
            Conference_Location : 
Kwei-Shan
         
        
        
            DOI : 
10.1109/ISNE.2014.6839389