Author_Institution :
Central Res. Lab., Hitachi, Ltd., Tokyo, Japan
Abstract :
The minimum operating voltage, Vmin, of memory-rich nanoscale CMOS LSIs is investigated to open the door to the below 0.5-V era. A new method using a timing margin is proposed to evaluate Vmin. It shows that Vmin is very sensitive to the threshold-voltage variations, ΔVt, which become more significant with device scaling, and to the lowest necessary threshold voltage, Vt0, of MOSFETs. As a result of comparing the Vmins of logic, SRAM, and DRAM blocks, it turns out that the SRAM block is problematic because it has the highest Vmin despite using RAM repair techniques. Various techniques are thus reviewed, including shortening the data line, up-sizing the MOSFETs, and control of the common source line or the word line. To further reduce the Vmins of the blocks, ΔVt-immune MOSFETs such as a planar fully-depleted structure (FD-SOI) and fin-type structure (FinFET), and low-Vt0 circuits are discussed, showing the below 0.5-V CMOS era feasible to come.
Keywords :
CMOS integrated circuits; DRAM chips; MOSFET; SRAM chips; large scale integration; logic gates; silicon-on-insulator; DRAM blocks; FD-SOI; FinFET; MOSFET; SRAM blocks; common source line control; device scaling; device-conscious circuit design; fin-type structure; memory-rich nanoscale CMOS LSI; planar fully-depleted structure; threshold voltage; threshold-voltage variations; timing margin; CMOS integrated circuits; Logic gates; MOSFETs; Maintenance engineering; Nanoscale devices; Random access memory; Timing; DRAM; FD-SOI; FinFET; SRAM; The minimum operating voltage;