Title :
Fabrication of metallic hard mold for polymeric waveguides with embedded micro-mirrors
Author :
Dou, Xinyuan ; Wang, Xiaolong ; Huang, Haiyu ; Lin, Xiaohui ; Chen, Ray T.
Author_Institution :
Microelectron. Res. Center, Univ. of Texas at Austin, Austin, TX, USA
Abstract :
In this paper, we presented fabrication of nickel metal mold with 45° tilted surfaces on both waveguide ends through electroplating process. To obtain 45° angle, SU-8 was exposed under D.I. water, with repeatable 0.5° error.
Keywords :
electroplating; integrated optics; micromirrors; moulding; nickel; optical fabrication; optical interconnections; optical polymers; optical waveguides; Ni; electroplating; embedded micromirrors; metallic hard mold; nickel metal mold; optical interconnects; polymeric waveguides; Electromagnetic waveguides; Optical arrays; Optical device fabrication; Optical interconnections; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Polymers; Surface waves;
Conference_Titel :
Photonics Society Winter Topicals Meeting Series (WTM), 2010 IEEE
Conference_Location :
Majorca
Print_ISBN :
978-1-4244-5240-8
Electronic_ISBN :
978-1-4244-5241-5
DOI :
10.1109/PHOTWTM.2010.5421953
