Title :
LTCC microreactor with thermal stabilization
Author :
Bembnowicz, Pawel ; Golonka, Leszek J.
Author_Institution :
Wroclaw Univ. of Technol., Wroclaw, Poland
Abstract :
The paper presents application of the LTCC (low temperature co-fired ceramic) technology in microsystems. A heated chamber with additional temperature sensors is demonstrated. The aim of the work is to obtain heated microchamber characterized by small thermal inertia and uniform distribution of the temperature inside. The finite element analyses (FEA) are used to demonstrate thermal properties of designed device. Moreover, the temperature distribution on the surface of the microreactor is measured. The proper temperature management is achieved.
Keywords :
ceramic packaging; finite element analysis; microreactors; temperature distribution; thermal stability; (low temperature cofired ceramic; FEA; LTCC microreactor; finite element analyses; heated microchamber; temperature distribution; temperature sensors; thermal stabilization; Ceramics; Chemical reactors; Consumer electronics; Electronic packaging thermal management; Lamination; Optical sensors; Photonics; System-on-a-chip; Temperature sensors; Thermal sensors;
Conference_Titel :
Electronics Technology, 2008. ISSE '08. 31st International Spring Seminar on
Conference_Location :
Budapest
Print_ISBN :
978-1-4244-3972-0
Electronic_ISBN :
978-1-4244-3974-4
DOI :
10.1109/ISSE.2008.5276631
