Simulation and indirect measurement of temperature change in polyimide induced by laser ablation at 355 nm

Author

Balogh, Bálint ; Gordon, Péter ; Sinkovics, Bálint

Author_Institution

Dept. of Electron. Technol., Budapest Univ. of Technol. & Econ.

fYear

0

Firstpage

426

Lastpage

430

Abstract

Thermal effect plays an important role during frequency tripled nanosecond Nd:YAG laser ablation of polyimide. This paper describes simulation results and experimental investigations of laser induced temperature change in polyimide. The experimental results show that the ablation rate is temperature dependent, which means the underlying copper layer and the pulse repetition frequency (PRF) influence the etch depth. Based on our model it is possible to control the processing parameters according to the pattern geometry for a better exploitation of laser micromachining

Keywords

laser ablation; laser beam machining; polymers; temperature measurement; 355 nm; ablation rate; copper layer; etch depth; laser ablation; laser induced temperature change; laser micromachining; pattern geometry; polyimide; pulse repetition frequency; temperature change measurement; thermal effect; Copper; Etching; Frequency; Laser ablation; Laser modes; Laser transitions; Polyimides; Solid modeling; Temperature dependence; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. 28th International Spring Seminar on

Conference_Location

Wiener Neustadt

Print_ISBN

0-7803-9325-2

Type

conf

DOI

10.1109/ISSE.2005.1491066

Filename

1491066