Development of a novel humidity sensor with error-compensated measurement system

This paper documents the creation of a complete PC-based humidity sensing system, implemented using LabVIEW from National Instruments. The humidity sensor, which has a measured sensitivity of 0.25%/RH%, is manufactured by thin film technology from a novel combination of SiO/In₂O₃. Both the humidity sensor and a standard temperature sensor are interfaced to a PC using a front-end signal conditioning circuit. The entire system has been analyzed mathematically and the necessary algorithms for error-compensation have been developed. The resulting measurement system is efficient, accurate and flexible.