Development of a novel humidity sensor with error-compensated measurement system

Author

Arshak, K. ; Twomey, K. ; Heffernan, D.

Author_Institution

Microelectron. & Semicond. Res. Group, Limerick Univ., Ireland

Volume

1

fYear

2002

fDate

6/24/1905 12:00:00 AM

Firstpage

215

Abstract

This paper documents the creation of a complete PC-based humidity sensing system, implemented using LabVIEW from National Instruments. The humidity sensor, which has a measured sensitivity of 0.25%/RH%, is manufactured by thin film technology from a novel combination of SiO/In₂O₃. Both the humidity sensor and a standard temperature sensor are interfaced to a PC using a front-end signal conditioning circuit. The entire system has been analyzed mathematically and the necessary algorithms for error-compensation have been developed. The resulting measurement system is efficient, accurate and flexible.

Keywords

computerised instrumentation; error compensation; humidity sensors; indium compounds; semiconductor materials; silicon compounds; LabVIEW; PC-based humidity sensing system; SiO-In₂O₃; SiO/In₂O₃; error-compensated measurement system; front-end signal conditioning circuit; humidity sensor; thin film technology; Circuits; Conducting materials; Humidity measurement; Instruments; Low pass filters; Sensor phenomena and characterization; Sensor systems; Temperature sensors; Testing; Thin film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 2002. MIEL 2002. 23rd International Conference on

Print_ISBN

0-7803-7235-2

Type

conf

DOI

10.1109/MIEL.2002.1003178

Filename

1003178