Title :
Asymmetric ratio sensors of nonelectric quantities
Author :
Tvarozek, Vladimir ; Reznicek, Zdenek ; Jakubec, Andrej ; Novotny, Ivan
Author_Institution :
Dept. of Microelectron., Slovak Univ. of Technol., Ilkovicova, Slovakia
fDate :
6/24/1905 12:00:00 AM
Abstract :
A novel asymmetric ratio resistance method for the measuring of nonelectric quantity changes, e.g. temperature differences, is introduced. On the basis of that method the combined temperature sensor has been developed with high accuracy (relative error ≤±0.1%) and sensitivity adjustable to the desired value (Cr= -500 ppm/°C). This principle is applicable in thermal biosensors as well as in microelectrochemical sensors and also in various physical microsensors.
Keywords :
electrochemical sensors; measurement errors; microsensors; temperature sensors; accuracy; asymmetric ratio sensors; combined temperature sensor; microelectrochemical sensors; nonelectric quantities; physical microsensors; relative error; sensitivity; temperature differences; thermal biosensors; Biosensors; Chemical sensors; Chemical technology; Electrical resistance measurement; Immune system; Resistors; Temperature control; Temperature measurement; Temperature sensors; Thermal sensors;
Conference_Titel :
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Print_ISBN :
0-7803-7235-2
DOI :
10.1109/MIEL.2002.1003179
