Title :
Mechanical influences on the electrical characteristics of the mobile gate MOS capacitors
Author :
Dobrescu, L. ; Dobrescu, D. ; Rusu, A. ; Ravariu, C.
Author_Institution :
Fac. of Electron. & Telecommun., Politehnic Univ. of Bucharest, Romania
fDate :
6/24/1905 12:00:00 AM
Abstract :
This paper presents the model for an electromechanical variable capacitor designed as an MOS capacitor with a beam. It studies the influences of the beam on the electrical characteristics of the capacitor.
Keywords :
BiCMOS integrated circuits; MOS capacitors; electromechanical filters; BiCMOS; electrical characteristics; electromechanical variable capacitor; mobile gate MOS capacitors; Electric variables; Electrostatics; Filters; MOS capacitors; Mathematical model; Radio frequency; Springs; Tunable circuits and devices; Voltage; Voltage-controlled oscillators;
Conference_Titel :
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Print_ISBN :
0-7803-7235-2
DOI :
10.1109/MIEL.2002.1003181
