Title :
Handling and assembly in MST - final results of a European network
Author :
Popovic, G. ; Almansa, A. ; Chatzitheodoridis, E. ; Petrovic, D. ; Medico, O. ; Brenner, W. ; Sümecz, F. ; Detter, H.
Author_Institution :
Inst. for Micro Technique & Precision Eng., Vienna Univ. of Technol., Austria
fDate :
6/24/1905 12:00:00 AM
Abstract :
The efforts to bring micro system technology (MST) closer to industrial production have been supported by the European network "handling and assembly of functionally adapted microcomponents" (HAFAM) under the EC programme "training and mobility of researchers". This paper presents some of the final results of the HAFAM network. Topics addressed in the paper are: adaptation of high precision positioning stages to the needs of handling and assembly of microparts; development of tools for handling and assembly and methods for automation; combination of different technologies in one fabrication process for batch assembly purposes; joining techniques; methods and devices for quality control and characterization of various MST structures during and after the assembly process; and finally, norms and standardisation.
Keywords :
joining processes; materials handling; microassembling; micromechanical devices; micropositioning; production control; quality control; standardisation; EC training programme; HAFAM European network; MST industrial production; MST structure characterization; MST structure quality control; assembly automation methods; assembly norms; assembly processes; assembly standardisation; assembly tool development; batch assembly; fabrication processes; functionally adapted microcomponents; handling tool development; high precision positioning stage adaption; joining techniques; micro system technology; microparts assembly; microparts handling; quality control devices; quality control methods; researchers training/mobility; technologies combination; Assembly; Automation; Costs; Fabrication; Industrial training; Intelligent networks; Microwave integrated circuits; Paper technology; Production systems; Quality control;
Conference_Titel :
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Print_ISBN :
0-7803-7235-2
DOI :
10.1109/MIEL.2002.1003187