DocumentCode
1614073
Title
Ellipsometry and thin films parameters measurement
Author
Kalimanova, Ivanka ; Ilieva, Nevelina ; Georgieva, Margarita
fYear
2005
Firstpage
472
Lastpage
475
Keywords
Biomedical optical imaging; Ellipsometry; Measurement techniques; Optical films; Optical polarization; Optical reflection; Optical refraction; Optical sensors; Optical surface waves; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. 28th International Spring Seminar on
Print_ISBN
0-7803-9325-2
Type
conf
DOI
10.1109/ISSE.2005.1491074
Filename
1491074
Link To Document