Complex permittivity measurement of aluminum nitride by the cut-off circular waveguide method from 40GHz to 100GHz

Author

Shimizu, Takashi ; Kawahara, Yuki ; Akasaka, Seizo ; Kogami, Yoshinori

Author_Institution

Graduated Sch. of Eng., Utsunomiya Univ., Tochigi, Japan

fYear

2011

Firstpage

1450

Lastpage

1453

Abstract

The usefulness of the complex permittivity measurement for high dielectric constant material with ε_r ≈ 8~10 by the cut-off circular waveguide method in W band is investigated. The frequency dependence of the complex permittivity for aluminum nitride plates is measured form 40GHz to 100GHz by using 50GHz, 80GHz and 100GHz cavity resonators, and compared with the calculated results of Debye-type dielectric dispersion due to dipolar relaxation. The measured results show the validity of this method for high dielectric constant material in W band.

Keywords

cavity resonators; dielectric materials; permittivity; Debye-type dielectric dispersion; aluminum nitride plates; cavity resonators; complex permittivity measurement; cut-off circular waveguide method; dipolar relaxation; frequency 40 GHz to 100 GHz; high dielectric constant material; Cavity resonators; Frequency measurement; Millimeter wave measurements; Permittivity; Permittivity measurement; Semiconductor device measurement; Complex permittivity; Cut-off circular waveguide method; Dielectric Material; Millimeter wave measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference Proceedings (APMC), 2011 Asia-Pacific

Conference_Location

Melbourne, VIC

Print_ISBN

978-1-4577-2034-5

Type

conf

Filename

6174035