• DocumentCode
    1615207
  • Title

    Defect Intelligent Sampling System

  • Author

    Lin, Chen-Ting ; Huang, Chin-Chang ; Yang, Chin-Yi ; Wu, Yao-Wen ; Lu, Chin-Sheng ; Tsai, Po-Yueh ; Huang, Chih-Mu ; Wang, Ying-Lang

  • Author_Institution
    Taiwan Semicond. Manuf. Co., Ltd., Tainan, Taiwan
  • fYear
    2010
  • Firstpage
    162
  • Lastpage
    164
  • Abstract
    This paper describes a new paradigm of defect sampling, the Defect Intelligent Sampling System (Defect-ISS), which introduces a far more effective in-line defect inspection and process control method in a diverse product and technology node mass production environment. Three important benefits are realized with the implementation of Defect-ISS: (1) Sampling stability (2) Satisfactory coverage of products in line (3) Comprehensive inclusion of the process tools.
  • Keywords
    image sampling; process control; defect intelligent sampling system; defect-ISS; in-line defect inspection; process control method; process tools; technology node mass production environment; Inspection; Mass production; Monitoring; Process control; Time frequency analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
  • Conference_Location
    San Francisco, CA
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-4244-6517-0
  • Type

    conf

  • DOI
    10.1109/ASMC.2010.5551440
  • Filename
    5551440
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1615207