• DocumentCode
    1615612
  • Title

    Laser-Induced Fluorescence and Probe Measurements on an Argon Helicon Plasma with Magnetic Nozzle

  • Author

    Denning, C. Mark ; Scharer, John E. ; Wiebold, Matt

  • Author_Institution
    Univ. of Wisconsin-Madison, Madison
  • fYear
    2007
  • Firstpage
    235
  • Lastpage
    235
  • Abstract
    Summary form only given. Measurements are performed on an argon helicon plasma with magnetic nozzle field. The experimental apparatus consists of a 10-cm-diameter cylindrical Pyrex helicon source region connected to a 55-cm-diameter aluminum expansion chamber. The operating neutral pressure is up to 1 mTorr in the source region and 0.1 mTorr in the expansion region due to chamber cross-sections, a nozzle aperture, and differential pumping. The plasma is formed by an efficient half-turn double-helix antenna operating at 13.56 MHz with power scaling up to 3 kW of input power. A static axial magnetic field is generated, with source region fields up to 1 kG and magnetic nozzle peak fields of up to 1.5 kG. Laser-induced fluorescence (LIF) using a tunable diode laser centered around a vacuum wavelength of 668.614 nm is used to measure axial ion velocity distributions and to detect any acceleration resulting from plasma potential variations near the magnetic field gradient and in the magnetic field expansion region. An emissive probe consisting of a thoriated tungsten filament is used to determine the plasma potential gradient along the experimental axis in the magnetic nozzle region. Langmuir probe and 105 GHz microwave interferometry are used to determine the plasma density, which is measured up to 1 x 1013 cm-3 in the source region. The wave magnetic field is measured using a B-dot probe to determine the helicon source wave structure. Mach probe measurements of ion drift are compared with LIF results. The character of the ion distribution and plasma potential variations in the expansion region are measured for a range of magnetic field gradients and plasma densities.
  • Keywords
    Langmuir probes; argon; fluorescence; helicons; laser beam effects; nozzles; plasma density; plasma probes; Ar; Langmuir probe; Pyrex helicon source; aluminum expansion chamber; argon helicon plasma; frequency 13.56 MHz; laser-induced fluorescence; magnetic nozzle; microwave interferometry; plasma densities; probe measurements; wavelength 668.614 nm; Argon; Density measurement; Fluorescence; Magnetic field measurement; Plasma accelerators; Plasma density; Plasma measurements; Plasma sources; Plasma waves; Probes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2007. ICOPS 2007. IEEE 34th International Conference on
  • Conference_Location
    Albuquerque, NM
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4244-0915-0
  • Type

    conf

  • DOI
    10.1109/PPPS.2007.4345541
  • Filename
    4345541