• DocumentCode
    1616081
  • Title

    A smart sampling algorithm to minimize risk dynamically

  • Author

    Dauzére-Pérès, Stéphane ; Rouveyrol, Jean-Loup ; Yugma, Claude ; Vialletelle, Philippe

  • Author_Institution
    Centre Microelectron. de Provence, Ecole des Mines de St.-Etienne, Gardanne, France
  • fYear
    2010
  • Firstpage
    307
  • Lastpage
    310
  • Abstract
    In order to maximize the information and thus to minimize risk from measurement and to take into account measurement capacities, an algorithm is proposed to sample lots. An indicator, called Global Sampling Indicator (GSI), has been defined to select the lots to sample, and to schedule them on the measurement tools. A simulator called S5 (Smart Sampling Scheduling and Skipping Simulator) has been implemented and validated on actual data. It shows that the risks can be strongly reduced while keeping a limited number of measures.
  • Keywords
    lot sizing; minimisation; risk management; sampling methods; scheduling; semiconductor industry; GSI; global sampling indicator; measurement capacity; minimize risk; skipping simulator; smart sampling algorithm; smart sampling scheduling; Current measurement; Manufacturing; Metrology; Production; Schedules; Semiconductor device measurement; Time measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
  • Conference_Location
    San Francisco, CA
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-4244-6517-0
  • Type

    conf

  • DOI
    10.1109/ASMC.2010.5551470
  • Filename
    5551470