Title :
A smart sampling algorithm to minimize risk dynamically
Author :
Dauzére-Pérès, Stéphane ; Rouveyrol, Jean-Loup ; Yugma, Claude ; Vialletelle, Philippe
Author_Institution :
Centre Microelectron. de Provence, Ecole des Mines de St.-Etienne, Gardanne, France
Abstract :
In order to maximize the information and thus to minimize risk from measurement and to take into account measurement capacities, an algorithm is proposed to sample lots. An indicator, called Global Sampling Indicator (GSI), has been defined to select the lots to sample, and to schedule them on the measurement tools. A simulator called S5 (Smart Sampling Scheduling and Skipping Simulator) has been implemented and validated on actual data. It shows that the risks can be strongly reduced while keeping a limited number of measures.
Keywords :
lot sizing; minimisation; risk management; sampling methods; scheduling; semiconductor industry; GSI; global sampling indicator; measurement capacity; minimize risk; skipping simulator; smart sampling algorithm; smart sampling scheduling; Current measurement; Manufacturing; Metrology; Production; Schedules; Semiconductor device measurement; Time measurement;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-6517-0
DOI :
10.1109/ASMC.2010.5551470
