DocumentCode
1616081
Title
A smart sampling algorithm to minimize risk dynamically
Author
Dauzére-Pérès, Stéphane ; Rouveyrol, Jean-Loup ; Yugma, Claude ; Vialletelle, Philippe
Author_Institution
Centre Microelectron. de Provence, Ecole des Mines de St.-Etienne, Gardanne, France
fYear
2010
Firstpage
307
Lastpage
310
Abstract
In order to maximize the information and thus to minimize risk from measurement and to take into account measurement capacities, an algorithm is proposed to sample lots. An indicator, called Global Sampling Indicator (GSI), has been defined to select the lots to sample, and to schedule them on the measurement tools. A simulator called S5 (Smart Sampling Scheduling and Skipping Simulator) has been implemented and validated on actual data. It shows that the risks can be strongly reduced while keeping a limited number of measures.
Keywords
lot sizing; minimisation; risk management; sampling methods; scheduling; semiconductor industry; GSI; global sampling indicator; measurement capacity; minimize risk; skipping simulator; smart sampling algorithm; smart sampling scheduling; Current measurement; Manufacturing; Metrology; Production; Schedules; Semiconductor device measurement; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
Conference_Location
San Francisco, CA
ISSN
1078-8743
Print_ISBN
978-1-4244-6517-0
Type
conf
DOI
10.1109/ASMC.2010.5551470
Filename
5551470
Link To Document