• DocumentCode
    1616105
  • Title

    Reducing semiconductor process tool resource usage – pilot project results

  • Author

    Hawkins, Parris ; Neuber, Andreas ; Vepa, Krishna

  • Author_Institution
    Appl. Mater., Santa Clara, CA, USA
  • fYear
    2010
  • Firstpage
    293
  • Lastpage
    296
  • Abstract
    Applied Materials is working with customers to assess new ways to identify opportunities to reduce resources usage (energy, process chemicals/gasses) by existing semiconductor process tools. Through six customer pilot projects we have identified potential average savings of $22.5K per year, for the CMP and CVD process tool examined, by using a consultative service approach to business and financial analysis that pinpoints opportunities for process resource reduction without diverting critical engineering personnel from their core responsibilities.
  • Keywords
    resource allocation; semiconductor industry; Applied Materials; CMP process tool; CVD process tool; business analysis; financial analysis; semiconductor process tool resource usage reduction; Chemicals; Cleaning; Materials; Monitoring; Optimization; Software; Standards;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
  • Conference_Location
    San Francisco, CA
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-4244-6517-0
  • Type

    conf

  • DOI
    10.1109/ASMC.2010.5551471
  • Filename
    5551471