Title :
Reducing semiconductor process tool resource usage – pilot project results
Author :
Hawkins, Parris ; Neuber, Andreas ; Vepa, Krishna
Author_Institution :
Appl. Mater., Santa Clara, CA, USA
Abstract :
Applied Materials is working with customers to assess new ways to identify opportunities to reduce resources usage (energy, process chemicals/gasses) by existing semiconductor process tools. Through six customer pilot projects we have identified potential average savings of $22.5K per year, for the CMP and CVD process tool examined, by using a consultative service approach to business and financial analysis that pinpoints opportunities for process resource reduction without diverting critical engineering personnel from their core responsibilities.
Keywords :
resource allocation; semiconductor industry; Applied Materials; CMP process tool; CVD process tool; business analysis; financial analysis; semiconductor process tool resource usage reduction; Chemicals; Cleaning; Materials; Monitoring; Optimization; Software; Standards;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-6517-0
DOI :
10.1109/ASMC.2010.5551471