DocumentCode
1616105
Title
Reducing semiconductor process tool resource usage – pilot project results
Author
Hawkins, Parris ; Neuber, Andreas ; Vepa, Krishna
Author_Institution
Appl. Mater., Santa Clara, CA, USA
fYear
2010
Firstpage
293
Lastpage
296
Abstract
Applied Materials is working with customers to assess new ways to identify opportunities to reduce resources usage (energy, process chemicals/gasses) by existing semiconductor process tools. Through six customer pilot projects we have identified potential average savings of $22.5K per year, for the CMP and CVD process tool examined, by using a consultative service approach to business and financial analysis that pinpoints opportunities for process resource reduction without diverting critical engineering personnel from their core responsibilities.
Keywords
resource allocation; semiconductor industry; Applied Materials; CMP process tool; CVD process tool; business analysis; financial analysis; semiconductor process tool resource usage reduction; Chemicals; Cleaning; Materials; Monitoring; Optimization; Software; Standards;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
Conference_Location
San Francisco, CA
ISSN
1078-8743
Print_ISBN
978-1-4244-6517-0
Type
conf
DOI
10.1109/ASMC.2010.5551471
Filename
5551471
Link To Document