Title :
Rule induction for identifying multi layer tool commonalities
Author :
Borisov, Alexander ; Chikalov, Igor ; Pierre, Eric St ; Tuv, Eugene
Author_Institution :
Intel Corp., Chandler, AZ, USA
Abstract :
A methodology based on association rule concepts is given for detecting fab tool commonality of affected lots. The performance of the methodology is then compared to several traditional methods such as ANOVA and contingency tables using eight actual production cases. In each case, the offending tool is affecting lots at multiple process layers.
Keywords :
data mining; statistical analysis; ANOVA; association rule induction; contingency tables; fab tool commonality detection; multilayer tool commonalities identification; statistical analysis; Algorithm design and analysis; Analysis of variance; Association rules; Databases; Fault diagnosis; Production; Radio access networks;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-6517-0
DOI :
10.1109/ASMC.2010.5551477
