Active oxygen detection using Quartz Crystal Microbalance method under inductively coupled oxygen plasma

Author

Matsumoto, Hiroyuki ; Matsuoka, Mikihiko ; Noda, Kazutoshi

Author_Institution

Corp. Adv. Technol. Center, Iwasaki Electr. Co., Ltd., Gyoda

fYear

2008

Firstpage

2185

Lastpage

2188

Abstract

Active oxygen generated under inductively coupled oxygen plasma such as atomic oxygen radicals and molecular oxygen radicals has been successfully monitored utilizing the Ag(silver)-coated and Carbon-coated Quartz Crystal Microbalance (QCM) method. The Ag-coated QCM showed a frequency shift (i.e., mass change on the electrode surface of the crystal) of over 6500 Hz in 100 seconds, which corresponds to an increase of approximately 6500 ng in mass conversion while the Carbon-coated QCM showed a slight mass-decrease in 300 seconds.

Keywords

chemical sensors; microbalances; active oxygen detection; atomic oxygen radicals; electrode surface; inductively coupled oxygen plasma; mass conversion; molecular oxygen radicals; quartz crystal microbalance method; Atomic measurements; Electrodes; Electron tubes; Frequency measurement; Glass; Plasma measurements; Plasma sources; Radio frequency; Silver; Surface cleaning; active oxygen; inductively coupled plasma; oxygen radicals; quartz crystal microbalance;

fLanguage

English

Publisher

ieee

Conference_Titel

Control, Automation and Systems, 2008. ICCAS 2008. International Conference on

Conference_Location

Seoul

Print_ISBN

978-89-950038-9-3

Electronic_ISBN

978-89-93215-01-4

Type

conf

DOI

10.1109/ICCAS.2008.4694461

Filename

4694461