Title :
2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)
Abstract :
The following topics are dealt with: power devices and ICs; microsystem technologies; passive devices; optoelectronic and microwave devices; semiconductor physics and characterisation.
Keywords :
capacitors; inductors; integrated circuit technology; micromachining; micromechanical devices; microwave devices; optoelectronic devices; power integrated circuits; power semiconductor devices; power supply circuits; resistors; microsystem technologies; microwave devices; optoelectronic devices; passive devices; power IC; power devices; semiconductor characterisation; semiconductor physics; Capacitors; Inductors; Integrated circuit fabrication; Microelectromechanical devices; Micromachining; Microwave devices; Optoelectronic devices; Power integrated circuits; Power semiconductor devices; Power supplies; Resistors;
Conference_Titel :
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Conference_Location :
Nis, Yugoslavia
Print_ISBN :
0-7803-7235-2
DOI :
10.1109/MIEL.2002.1003289
