Title :
Series resistance and mobility in mechanically-exfoliated layered transition metal dichalcogenide MOSFETs
Author :
Sachid, Angada B. ; Hui Fang ; Javey, Ali ; Chenming Hu
Author_Institution :
Electr. Eng. & Comput. Sci., Univ. of California Berkeley, Berkeley, CA, USA
Abstract :
We show that transmission line method, where a set of devices are used, does not always correctly estimate series resistance of mechanically-exfoliated transition metal dichalcogenide MOSFETs. We calculate series resistance and carrier mobility from current-voltage characteristics of a single device. We show that series resistance should be considered for accurate mobility calculation even for long channel devices.
Keywords :
MOSFET; carrier mobility; molybdenum compounds; tungsten compounds; MoS2; WSe2; carrier mobility; current-voltage characteristics; long channel devices; mechanically-exfoliated layered transition metal dichalcogenide MOSFETs; series resistance; transmission line method; Doping; Logic gates; MOSFET; Materials; Metals; Power transmission lines; Resistance;
Conference_Titel :
VLSI Technology, Systems and Application (VLSI-TSA), Proceedings of Technical Program - 2014 International Symposium on
Conference_Location :
Hsinchu
DOI :
10.1109/VLSI-TSA.2014.6839668