A novel touch probe triggered by harmonic generation the International Conference on Control, Automation and Systems 2008 (ICCAS 2008)

Author

Mizumoto, Hiroshi ; Imai, Masao ; Yabuta, Yoshito ; Arii, Shiroh

Author_Institution

Fac. of Eng., Tottori Univ., Tottori

fYear

2008

Firstpage

1553

Lastpage

1556

Abstract

A new type of touch probe for measuring small optical parts is proposed. The probe is excited by a piezoelectric actuator in sinusoidal waveform. When the vibrating probe touches an object, harmonic components of the vibration appear in the power spectrum of the probe vibration. When the power of the second harmonic exceeds a threshold level, it is judged that the probe touches the object. Measuring force is small enough for measuring the surface of optical parts. The touch probe is mounted on a small CMM controlled by a PC and evaluated its performance by measuring a standard steel ball.

Keywords

harmonic generation; measurement systems; optical elements; piezoelectric actuators; ICCAS 2008; International Conference on Control, Automation and Systems 2008; harmonic components; harmonic generation; piezoelectric actuator; probe vibration; sinusoidal waveform; small optical parts; touch probe; vibrating probe; CMM; FFT; On-machine measurement; Piezoelectric actuator; Touch probe;

fLanguage

English

Publisher

ieee

Conference_Titel

Control, Automation and Systems, 2008. ICCAS 2008. International Conference on

Conference_Location

Seoul

Print_ISBN

978-89-950038-9-3

Electronic_ISBN

978-89-93215-01-4

Type

conf

DOI

10.1109/ICCAS.2008.4694480

Filename

4694480