DocumentCode
1617233
Title
Low temperature a-Si:H TFT on plastic films: materials and fabrication aspects
Author
Sazonov, Andrei ; Stryahilev, Denis ; Nathan, Arokia
Author_Institution
Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada
Volume
2
fYear
2002
fDate
6/24/1905 12:00:00 AM
Firstpage
525
Lastpage
528
Abstract
In this work, we developed fabrication technology for a-Si:H thin film transistors (TFTs) at 120°C for AM OLED displays on flexible plastic substrates. Our TFTs demonstrate performance very close to those fabricated at 260°C. This presentation focuses on materials optimization and fabrication process issues
Keywords
LED displays; amorphous semiconductors; elemental semiconductors; hydrogen; silicon; thin film transistors; 120 degC; AM OLED displays; Si:H; a-Si:H; fabrication aspects; flexible plastic substrates; low temperature TFT; materials optimization; thin film transistors; Coatings; Contacts; Fabrication; Flat panel displays; Organic light emitting diodes; Plastic films; Silicon; Substrates; Temperature; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Conference_Location
Nis
Print_ISBN
0-7803-7235-2
Type
conf
DOI
10.1109/MIEL.2002.1003312
Filename
1003312
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