Title :
Low temperature a-Si:H TFT on plastic films: materials and fabrication aspects
Author :
Sazonov, Andrei ; Stryahilev, Denis ; Nathan, Arokia
Author_Institution :
Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada
fDate :
6/24/1905 12:00:00 AM
Abstract :
In this work, we developed fabrication technology for a-Si:H thin film transistors (TFTs) at 120°C for AM OLED displays on flexible plastic substrates. Our TFTs demonstrate performance very close to those fabricated at 260°C. This presentation focuses on materials optimization and fabrication process issues
Keywords :
LED displays; amorphous semiconductors; elemental semiconductors; hydrogen; silicon; thin film transistors; 120 degC; AM OLED displays; Si:H; a-Si:H; fabrication aspects; flexible plastic substrates; low temperature TFT; materials optimization; thin film transistors; Coatings; Contacts; Fabrication; Flat panel displays; Organic light emitting diodes; Plastic films; Silicon; Substrates; Temperature; Thin film transistors;
Conference_Titel :
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-7235-2
DOI :
10.1109/MIEL.2002.1003312
