Surface Treatment of FPD Glass Substrates by a Uniform Cold Plasma Tunnel at Atmospheric Pressure

Author

Xu, X. ; Wang, S. ; Zhao, L.

Author_Institution

Acad. of Opto-electron., Beijing

fYear

2007

Firstpage

319

Lastpage

319

Abstract

Summary form only given. A novel atmospheric pressure plasma tunnel (APPT) has been developed for surface treatment of flat panel display (FPD) glass substrates at atmospheric pressure with gas mixtures containing argon and oxygen. The electrical properties of the plasma tunnel were presented by simultaneous measurement of current and voltage to further character the plasma. The effect of the plasma treatment on the surfaces of FPD glass substrates has also been studied by using contact angle measurement and scanning probe microscopy (SPM). The results show that the wettability of the surface has an obvious improvement after the plasma treatment.

Keywords

argon; contact angle; flat panel displays; gas mixtures; glass; oxygen; plasma materials processing; scanning probe microscopy; substrates; surface treatment; wetting; Ar-O₂; FPD glass substrates; argon; atmospheric pressure plasma tunnel; contact angle measurement; electrical properties; flat panel display; gas mixtures; oxygen; pressure 1 atm; scanning probe microscopy; surface treatment; uniform cold plasma tunnel; wettability; Argon; Atmospheric measurements; Atmospheric-pressure plasmas; Flat panel displays; Glass; Plasma displays; Plasma measurements; Plasma properties; Scanning probe microscopy; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2007. ICOPS 2007. IEEE 34th International Conference on

Conference_Location

Albuquerque, NM

ISSN

0730-9244

Print_ISBN

978-1-4244-0915-0

Type

conf

DOI

10.1109/PPPS.2007.4345625

Filename

4345625