Title :
A 0.25µm logarithmic CMOS imager for emissivity-compensated thermography
Author :
Hutter, Franz X. ; Brosch, Daniel ; Graf, Heinz-Gerd ; Klingler, Wolfram ; Strobel, Markus ; Burghartz, Joachim N.
Author_Institution :
Inst. for Microelectron., Stuttgart
Abstract :
Here, we present a logarithmic CMOS imager for emissivity-compensated thermography, having thermally-stable and optimized inorganic multilayer integrated filters and a pixel cell containing a subthreshold load transistor with optimized device layout, providing VGA resolution, 40fps, a measuring temperature range of 600 degC to 3000 degC, and a temperature resolution of ~5 degC.
Keywords :
CMOS image sensors; infrared imaging; VGA resolution; emissivity-compensated thermography; integrated filters; logarithmic CMOS imager; pixel cell; CMOS image sensors; Cameras; Diodes; Magnetic separation; Optical filters; Semiconductor device measurement; Silicon; Temperature measurement; Temperature sensors; Thermal sensors;
Conference_Titel :
Solid-State Circuits Conference - Digest of Technical Papers, 2009. ISSCC 2009. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-3458-9
DOI :
10.1109/ISSCC.2009.4977454