Title :
A high-voltage interface circuit for MEMS vibratory gyroscope
Author :
Ran Fang ; Wengao Lu ; Tingting Tao ; Guannan Wang ; Zhongjian Chen ; Yacong Zhang ; Dunshan Yu
Author_Institution :
Dept. of Microelectron., Peking Univ., Beijing, China
Abstract :
In this paper, a high-voltage interface circuit has been designed and implemented for MEMS gyroscope. Continuous-time charge sensitive amplifier with chopping stabilization technique is used in the conversion stage to achieve low noise performance. A closed driving loop for MEMS gyroscope which applying multiple supply voltages is presented. The chip is fabricated in a 0.35um 5V/12V high-voltage process. The test of the chip is performed with a MEMS vibratory gyroscope. The result shows that the driving output of the ASIC can ensure a stable oscillation in the driving axis.
Keywords :
amplifiers; application specific integrated circuits; gyroscopes; micromechanical devices; power integrated circuits; power supplies to apparatus; stability; ASIC; MEMS vibratory gyroscope; chip fabrication; chopping stabilization technique; closed driving loop; continuous-time charge sensitive amplifier; conversion stage; driving axis; high-voltage interface circuit; high-voltage process; low noise performance; multiple voltage supply; oscillation stable; size 0.35 mum; voltage 12 V; voltage 5 V; Application specific integrated circuits; Gyroscopes; Micromechanical devices; Noise; Power supplies; Resonant frequency; Sensors; MEMS gyroscope; capacitive sensing circuit; hight-voltage level shifter; multiple power supplies;
Conference_Titel :
Electron Devices and Solid State Circuit (EDSSC), 2012 IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
978-1-4673-5694-7
DOI :
10.1109/EDSSC.2012.6482825
