3D Shape Restoration System for Femto-Second Laser Processing Utilizing Image Obtained by Line Scan Laser

Author

Park, Jeonghong ; Park, Dongin ; Cho, Seungki ; Park, Youngwoo ; Ko, Yunho ; Lee, Jihong

Author_Institution

BK21 Mechatronics Group, Chungnam Nat. Univ., Taejon

fYear

2006

Firstpage

1968

Lastpage

1973

Abstract

In this paper, we consider a femtosecond laser processing system for ITO glass. To maximally deliver the laser energy, i.e., to focus the laser on the ITO glass, we propose a 3D shape restoration system for error compensation. The shape restoration system utilizes line laser and 2D profile image from the acquired profiles of the ITO glass. The proposed system is composed of line laser, high resolution camera, linear motion platform synchronized to image capturing, and control station. The results of the proposed system are compared with the results of SPM (scanning probe microscope) and prove the usefulness of the system

Keywords

error compensation; high-speed optical techniques; image sensors; indium compounds; laser beam machining; micromachining; optical control; optical glass; 2D profile image; 3D shape restoration system; ITO; ITO glass; InSnO; error compensation; femtosecond laser processing; high-resolution camera control; image capturing; laser energy; laser micromachining; line scan laser; linear motion platform; Cameras; Energy resolution; Error compensation; Glass; Image resolution; Image restoration; Indium tin oxide; Motion control; Optical control; Shape; 3D shape restoration system; Angle error; Distance error; Femtosecond laser; ITO glass; Line scan laser;

fLanguage

English

Publisher

ieee

Conference_Titel

SICE-ICASE, 2006. International Joint Conference

Conference_Location

Busan

Print_ISBN

89-950038-4-7

Electronic_ISBN

89-950038-5-5

Type

conf

DOI

10.1109/SICE.2006.315354

Filename

4109009