Title :
Real-time visualization measurement of electrostatic potential on the surface of a dielectric plate with a small charged metal plate
Author :
Nakaie, Toshiyuki ; Matsui, J. ; Miyamoto, Yutaka ; Kuriyama, Toshihide ; Maeda, Hideaki ; Takatsuji, Wataru ; Ueno, Yukiko ; Itoh, Takayuki
Author_Institution :
Hanwa Electron. IND. Co., Ltd., Ogaito, Japan
Abstract :
We first performed real-time visualization measurement of electrostatic potential on the surface of a dielectric plate with a small charged metal plate. Time change of the electric potential differed with the resistance of dielectric plate. We confirmed that electrostatic charge had penetrated into a dielectric plate.
Keywords :
electric potential; electrostatics; dielectric plate; electric potential; electrostatic potential; real-time visualization measurement; small charged metal plate; Conductors; Dielectric materials; Dielectrics; Electrodes; Sensor arrays;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2013 35th
Conference_Location :
Las Vegas, NV
