Title :
An s-z domain transformation method for the readout circuit design of closed-loop micromechanical capacitive accelerometer
Author :
Zhang Tingting ; Li Haojiong ; Huang Jingqing ; Zhao Meng ; Hong Lichen ; Zhang Yacong ; Lu Wengao ; Chen Zhongjian
Author_Institution :
Dept. of Microelectron., Peking Univ., Beijing, China
Abstract :
Matlab/Simulink tool has been widely used in system modeling of circuit design. However, its application in the discrete-time circuit is not enough mature. Based on the continuous-time circuit simulation results by Matlab/Simulink, an s-z transformation method for the discrete-time accelerometer system design is proposed in this paper. In this method, a switched-capacitor readout circuit for closed-loop micromechanical capacitive accelerometer is designed and fabricated in a 0.35μm 15V CMOS process. The accelerometer operates under ±6.5V supply with a full scale of ±50g and the equivalent noise acceleration (ENA) is tested to be 54μg/√(Hz) at 60Hz.
Keywords :
CMOS integrated circuits; Z transforms; accelerometers; capacitive sensors; closed loop systems; microfabrication; microsensors; readout electronics; CMOS process; ENA; Matlab-Simulink tool; closed-loop micromechanical capacitive accelerometer; discrete-time accelerometer system design; discrete-time circuit; equivalent noise acceleration; frequency 60 Hz; readout circuit design system modeling; s-z domain transformation method; size 0.35 mum; switched-capacitor readout circuit; voltage -6.5 V; voltage 6.5 V; Acceleration; Accelerometers; Circuit synthesis; Noise; Simulation; Software packages; Switching circuits; capacitive accelerometer; closed-loop; readout circuit; s-z transformation; switched-capacitor;
Conference_Titel :
Electron Devices and Solid State Circuit (EDSSC), 2012 IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
978-1-4673-5694-7
DOI :
10.1109/EDSSC.2012.6482851
