Simulation of low voltage RF MEMS switch for reconfigurable antennas

Radio frequency (RF) microelectromechanical (MEMS) switches and filters are extensively used for telecommunication in the last few years due to their high performance compared to the other microelectronics switches available in present electronic world. Considering the cost effectiveness and high performance, conventional switches are replaced by RF MEMS switch in mobile communication technology. In order to open circuit in transmission line or simply to get a short circuit, RF MEMS uses mechanical movement and it has immense privileges of low-insertion loss, good linearity and high isolation. To achieve low voltage, switching frequency and low insertion loss, a RF MEMS switch is designed in this study using ANSYS. Beam with meander have been model for structural and pull in analysis. For pull in analysis 2.5 V to 6 V has been applied. The best suitable deflection 2.8536 μm has been achieved at the 5 V applied pull in voltage with maximum equivalent stress 4.5278 MPa.